Suction table porous carbon chuck
Ideal for applications such as dicing saws, bonding machines, and tape mountings.
The "Porous Carbon Chuck" is a suction table that uses carbon porous material on its surface. Due to its porous nature, it can adhere to the entire surface of the workpiece, and it can also hold thin materials such as films. Additionally, it is capable of vacuum suction in environments where acid resistance and chemical resistance are required. Furthermore, because it is conductive, it can perform vacuum suction in devices that are sensitive to static electricity. It can accommodate various sizes and shapes. The workpieces include 200mm, 300mm, and 450mm wafers, glass substrates, and films. It is suitable for dicing saws, bonding machines, tape mountings, spin cleaning devices, and other semiconductor manufacturing equipment, as well as various inspection devices and printing-related equipment. For more details, please contact us or refer to the catalog.
- Company：マック産業機器 テクノロジーセンター
- Price：Other
